IONIX® 8'' UHV Magnetron
Sputtering Source

Features

  • full UHV compatibility
  • bakeable 200 °C, metallic seals only
  • internal mounting with CF interface or CF flange mounted ≥ CF250
  • target diameter 8” (200 mm)
  • targets 8 - 14 mm thick, non-magnetic
  • indirectly cooled targets
  • for DC, AC, RF and pulsed operation
  • water tubes Ø8xØ4 mm
Datasheet

The IONIX® IX8U magnetron sputtering source has a target diameter of 200 mm (8‘‘) and can be used with non-ferromagnetic targets of 6 – 14 mm thickness.

This magnetron features indirect cooling of the target. A discrete target clamping ring and a sliding anode enable to adjust the dark space gap for different target thicknesses. The magnetron is fully UHV compatible and it utilizes only metallic seals as well as construction materials with low-outgassing rate. It is bakeable up to 200 °C with its magnets mounted. It can operate in DC, AC, RF and pulsed power mode.

A model for magnetic target materials is optionally available. The IX8U can either be internally mounted with CF63 (CF16/CF40) interface or directly flange mounted on a CF250 flange.

Technical Data

typeIONIX-8UHV
model no.IX8U_9250 / _9260
formcircular / planar
diameter8” ± 0,2 mm, optional 200 mm
thickness8 to 14 mm
coolingindirect ***
dark space distance2,5 ± 0,5
diameter255 mm
height104 mm
weight19 kg
construction materialsSS, OF-Cu, Al2O3
sealing vac to airwelding, brazing, CF internal
sealing vac to waternone
sealing water to airFKM
He leak check≤ 1 x 10-9 mbar * l/s
vacuum interfaceCF63 / CF100
proposed mounting styleCF16 (CF40)
Ti, 20 Å/s; 2 KW DC, 7,5 cm
Cu, 75 Å/s; 2 KW, 7,5 cm
non-magnetic targets3 x 10-3 to 10-1 mbar Ar
best performance5 x 10-3 to 5 x 10-2 mbar Ar
He leak check≤ 1 x 10-9 mbar Ar * l/s
max. power, watts10 KW DC / 3 KW RF (**)
max. voltage, DC1000 V
max. current, DC25 A
rec. power supply 10 KW
connector DCscrew terminals
connector RF (**)**
water flow1 l / (min x kW)
minimum flow3 l/min
inlet temperature≤ 30°C
max. pressure≤ 3 bar open drain
water tubesØ8xØ4 mm PTFE
magnet arraypermanent
max. temperature200 °C

Accessories and options

  • chimney
  • gas inlet & distribution
  • model for magnetics targets:
    Ni 6 mm, Fe 3 mm thick with profile
  • quick coupling f/t
  • RF power line
  • coax power jack or screw terminals

Mounting options

  • flange mounting on CF250
  • straight tube OD 1” or OD 3/4”
  • quick coupling feedtrough
  • z-setting by manipulator
  • z-setting by coupling f/t

Flange mounting option

  • z-adjust: quick coupling f/t + tube OD 1”
  • z-manipulator

Assembly dwg

* This value refers to the magnetron itself. The maximum power is determined by the target material and its bonding or clamping technique.
** RF-Version requires special connector and/or installation. More details on request.
*** Direct cooling on request.

We reserve the right for technical changes in design and specifications without notice or obligations.

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