IONIX® 4'' UHV Magnetron
Sputtering Source

Features

  • full UHV compatibility
  • bakeable 200 °C, metallic seals only
  • internal mounting with CF interface or CF flange mounted ≥ CF160
  • target diameter 4” (101,6 mm)
  • targets 4 - 10 mm thick, non-magnetic
  • indirectly cooled targets
  • for DC, AC, RF and pulsed operation
  • water tubes Ø6xØ4 mm
Datasheet

The IONIX® IX4U magnetron sputtering source has a target diameter of 101,6 mm (4‘‘) and can be used with non-magnetic targets of 4 – 10 mm thickness.

This magnetron features indirect cooling of the target. A discrete target clamping ring and a sliding anode enable to adjust the dark space gap for different target thicknesses. The magnetron is fully UHV compatible and it utilizes only metallic seals as well as construction materials with low-outgassing rate. It is bakeable up to 200 °C with its magnets mounted. It can operate in DC, AC, RF and pulsed power mode.

A model for magnetic target materials is optionally available. The IX4U can either be internally mounted with CF63 (CF16/CF40) interface or directly flange mounted on a CF160 flange.

Technical Data

typeIONIX-4UHV
model no.IX4U_9270 / _9275 / _9260
formcircular / planar
diameter4” ± 0,2 mm, optional 100 mm
thickness4 to 10 mm
coolingindirect ***
dark space distance1,5 ± 0,5
diameter130 / 138 mm
height96 mm
weight5,5 kg
construction materialsSS, OF-Cu, Al2O3
sealing vac to airwelding, brazing, CF internal
sealing vac to waternone
sealing water to airFKM
He leak check≤ 1 x 10-9 mbar * l/s
vacuum interfaceCF63
proposed mounting styleCF16 / CF25 / CF40
Al, 29 Å/s; 1 KW, 10 cm
Al, 14 Å/s; 1 KW, 15 cm
non-magnetic targets3 x 10-3 to 10-1 mbar Ar
best performance5 x 10-3 to 5 x 10-2 mbar Ar
He leak check≤ 1 x 10-9 mbar Ar * l/s
max. power, watts3000 W DC / 1500 W RF (**)
max. voltage, DC1000 V
max. current, DC10 A
rec. power supply 3 KW
connector DCscrew terminals
connector RF (**)**
water flow1 l / (min x kW)
minimum flow2 l/min
inlet temperature≤ 30°C
max. pressure≤ 3 bar open drain
water tubesØ6xØ4 mm PTFE
magnet arraypermanent
max. temperature200 °C

Accessories and options

  • chimney
  • gas inlet & distribution
  • model for magnetics targets:
    Ni, Co 4 - 6 mm, Fe 2 - 3 mm thick with profile
  • quick coupling f/t
  • RF power line
  • pneumatic shutter
  • +/- 45° ex-situ tilt
  • 40° in-situ tilt
  • coax power jack or screw terminals

Mounting options

  • flange mounting on CF160
  • straight tube OD 1” or OD 3/4”
  • quick coupling feedtrough
  • z-setting by manipulator
  • z-setting by coupling f/t

Flange mounting option

  • z-adjust: quick coupling f/t + tube OD 1”
  • z-manipulator

Assembly dwg

* This value refers to the magnetron itself. The maximum power is determined by the target material and its bonding or clamping technique.
** RF-Version requires special connector and/or installation. More details on request.
*** Direct cooling on request.

We reserve the right for technical changes in design and specifications without notice or obligations.

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