IONIX® 3'' UHV Magnetron Sputtering Source

IONIX^® 3'' UHV Magnetron
Sputtering Source

full UHV compatibility
bakeable 200 °C, metallic seals only
internal mounting with CF interface or CF flange mounted ≥ CF100
target diameter 3” (76,2 mm)
targets 4 - 8 mm thick, non-magnetic
indirectly cooled targets
for DC, AC, RF and pulsed operation
water tubes Ø6xØ4 mm

The IONIX® IX3U magnetron sputtering source has a target diameter of 76,2 mm (3‘‘) and can be used with non-magnetic targets of 4 – 8 mm thickness.

This magnetron features indirect cooling of the target. A discrete target clamping ring and a sliding anode enable to adjust the dark space gap for different target thicknesses. The magnetron is fully UHV compatible and it utilizes only metallic seals as well as construction materials with low-outgassing rate. It is bakeable up to 200 °C with its magnets mounted. It can operate in DC, AC, RF and pulsed power mode.

A model for magnetic target materials is optionally available. The IX3U can either be internally mounted with CF63 (CF16/CF40) interface or directly flange mounted on a CF100 flange.

Technical Data

Magnetron

type	IONIX-3UHV
model no.	IX3U_9200 / _9207 / _9260

Target

form	circular / planar
diameter	3” ± 0,2 mm, optional 75 mm
thickness	4 to 8 mm
cooling	indirect ***
dark space distance	1,5 ± 0,5

Magnetron dimensions

diameter	101 / 111 mm
height	104 (+48) mm
weight	3,5 kg
construction materials	SS, OF-Cu, Al2O3
sealing vac to air	welding, brazing, CF internal
sealing vac to water	none
sealing water to air	FKM
He leak check	≤ 1 x 10^-9 mbar * l/s
vacuum interface	CF63 modified
proposed mounting style	CF16 / CF25 / CF40

Typical deposition rates

Al, 12 Å/s; 1 KW DC, 10 cm

Cu, 25 Å/s; 1 KW DC, 10 cm

Operating pressure

non-magnetic targets	3 x 10^-3 to 10^-1 mbar Ar
best performance	5 x 10^-3 to 5 x 10^-2 mbar Ar
He leak check	≤ 1 x 10^-9 mbar Ar * l/s

Electrial spec.

max. power, watts	1250 W DC / 750 W RF ()
max. voltage, DC	1000 V
max. current, DC	5 A
rec. power supply	1 KW
connector DC	TFC power line
connector RF ()**	–

Cooling water

water flow	1 l / (min x kW)
minimum flow	2 l/min
inlet temperature	≤ 30°C
max. pressure	≤ 3 bar open drain
water tubes	Ø6xØ4 mm PTFE

Related specifications

magnet array	permanent
max. temperature	200 °C

Accessories and options

Mounting options

Flange mounting option

Assembly dwg

* This value refers to the magnetron itself. The maximum power is determined by the target material and its bonding or clamping technique.
** RF-Version requires special connector and/or installation. More details on request.
*** Direct cooling on request.

We reserve the right for technical changes in design and specifications without notice or obligations.