IONIX® 5'' HV Planar Magnetron Sputtering Source

Features

  • internal mounting with DN25KF or CF16
  • target diameter 5” (127 mm)
  • optionally: magnetic targets: Ni 6 mm thick
  • targets 5 - 10 mm thick, non-magnetic
  • magnet array completely isolated from cooling water
  • directly cooled membrane plate
  • for DC, AC, RF and pulsed operation
  • water tubes Ø6xØ4 mm
Datasheet

The IONIX® IX5 has a target diameter of 127 mm (5‘‘) and can be used with non-magnetic targets varying from 5 – 10 mm.

Features indirect cooling of the target. The magnet array is completely isolated from the cooling water. The anode shield can be adjusted to set the dark space gap for different target thicknesses. A magnetron model for magnetic targets ( 6 mm Ni ) is optionally available.

By means of the KF50 interface the sputtering source can be either mounted on a straight Ø1‘‘ or Ø3/4‘‘ tube or on a tilt. ISO or CF flange mounted sources are also available.

Technical Data

typeIONIX-5HV
model no.IX5_A12x/_A13x
formcircular / planar
diameter5” ± 0,2 mm, optional 125 mm
thickness5 to 10 mm
coolingindirect
dark space distance2,0 ± 0,5
diameter168 / 178 mm
height63 mm
weight3,5 kg
construction materialsSS, OF-Cu, PTFE
vacuum interfaceKF50 / KF25 / CF16 / CF25
proposed mounting styletube Ø1” x 300 mm

 

Ti, 12 Å/s; 1,4 kW, 10 cm
Al, 18 Å/s; 2 kW, 15 cm
non-magnetic targets3 x 10-3 to 10-1 mbar Ar
best performance5 x 10-3 to 5 x 10-2 mbar Ar
He leak check≤ 1 x 10-8 mbar Ar * l/s
max. power, watts3000 W DC / 1500 W RF (**)
max. voltage, DC1000 V
max. current, DC20 A
rec. power supply 3 KW
connector DCscrew terminals
connector RF (**)**
water flow1 l / (min x kW)
minimum flow3 l/min
inlet temperature≤ 30°C
max. pressure≤ 3 bar open drain
water tubesØ6xØ4 mm PTFE
magnet arraypermanent NdFeB
max. temperature60 °C

Accessories and options

  • chimney
  • gas distribution
  • model for magnetics targets:
    Ni 6 mm
  • quick coupling f/t
  • RF power line
  • pneumatic shutter
  • +/- 45° ex-situ tilt
  • 40° in-situ tilt
  • coax power jack or screw terminals

Mounting options

  • ISO200-K or CF200
  • z-manipulator
  • z-adjust: quick coupling f/t + tube OD 1”

Assembly dwg

* This value refers to the magnetron itself. The maximum power is determined by the target material and
its bonding or clamping technique.
** RF-Version requires special connector and/or installation. More details on request.

We reserve the right for technical changes in design and specifications without notice or obligations.

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