IONIX® 6'' HV Planar Magnetron Sputtering Source

Features

  • internal mounting with DN50KF interface
  • target diameter 6” (152,4 mm)
  • magnetic targets: Ni 4 mm, Fe 2 mm thick
  • targets 4 - 12 mm thick, non-magnetic
  • magnet array completely isolated from cooling water
  • directly cooled membrane plate
  • for DC, AC, RF and pulsed operation
  • water tubes Ø6xØ4 mm
Datasheet

The IONIX® IX6 has a target diameter of 152,4 mm (6‘‘) and can be used with non-magnetic targets varying from 4 – 12 mm in small scale production systems. Optionally targets of 150 mm diameter can be used.

The IX6 features indirect cooling of the target. The magnet array is completely isolated from the cooling water. A sliding anode shield enables
to adjust the dark space gap for different target thicknesses.

By means of the KF50 interface the sputtering source can be either mounted on a straight Ø1‘‘ or Ø3/4‘‘ tube or on a tilt. ISO or CF flange mounted sources are also available.

Technical Data

typeIONIX-6HV
model no.IX6_A140 – A143
formcircular / planar
diameter6” ± 0,2 mm, optional 150 mm
thickness5 to 12 mm
coolingindirect
dark space distance2,0 ± 0,5
diameter190 / 202 mm
height70 mm
weight8,0 kg
construction materialsSS, OF-Cu, PTFE
vacuum interfaceKF50
proposed mounting styletube Ø1” x 300 mm

 

Mo, 8 Å/s; 1 kW, 15 cm
Cu, 27 Å/s; 1 kW, 15 cm
non-magnetic targets3 x 10-3 to 10-1 mbar Ar
best performance5 x 10-3 to 5 x 10-2 mbar Ar
He leak check≤ 1 x 10-8 mbar Ar * l/s
max. power, watts6000 W DC / 3000 W RF (**)
max. voltage, DC1000 V
max. current, DC20 A
rec. power supply 5 KW
connector DCscrew terminals
connector RF (**)**
water flow1 l / (min x kW)
minimum flow2 l/min
inlet temperature≤ 30°C
max. pressure≤ 3 bar open drain
water tubesØ6xØ4 mm PTFE
magnet arraypermanent NdFeB
max. temperature60 °C

Accessories and options

  • chimney
  • gas distribution
  • model for magnetics targets:
    Fe 2-3 mm prof., Ni 4 mm
  • quick coupling f/t
  • RF power line
  • pneumatic shutter
  • +/- 45° ex-situ tilt
  • 40° in-situ tilt
  • coax power jack or screw terminals

Mounting options

  • ISO200-K or CF200
  • z-manipulator
  • z-adjust: quick coupling f/t + tube OD 1”

Assembly dwg

* This value refers to the magnetron itself. The maximum power is determined by the target material and
its bonding or clamping technique.
** RF-Version requires special connector and/or installation. More details on request.

We reserve the right for technical changes in design and specifications without notice or obligations.

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