IONIX® 10'' HV Planar Magnetron Sputtering Source

Features

  • internal mounting with ISO63 interface
  • target diameter 10” (254 mm)
  • optionally: magnetic targets: Ni 6 mm thick
  • targets 8 - 16 mm thick, non-magnetic
  • magnet array completely isolated from cooling water
  • indirectly cooled targets
  • for DC, AC, RF and pulsed operation
  • water tubes Ø8xØ6 mm
Datasheet

The IONIX® IX10 has a target diameter of 254 mm (10‘‘) and can be used with non-magnetic targets varying from 8 – 16 mm in small scale production systems. Optionally targets of 250 mm diameter can be used. The achievable film thickness homogeneity is ±5% on Ø150 mm substrates for selected materials, best distance will be between 50 – 120 mm and must be optimized for each sputtering target material.

The IX10 features indirect cooling of the target. The magnet array is completely isolated from the cooling water. A sliding anode enables to adjust the dark space gap for different target thicknesses. A magnetron model for magnetic targets ( 6 mm Ni ) is optionally available.

By means of the ISO63 interface the sputtering source can be either mounted on a straight Ø1‘‘ or Ø3/4‘‘ tube or on a tilt. ISO or CF flange mounted sources are also available.

Technical Data

typeIONIX-10HV
model no.IX10_A120 – A127
formcircular / planar
diameter10” ± 0,2 mm, optional 250 mm
thickness8 to 16 mm
coolingindirect
dark space distance2,5 ± 0,5
diameter294 / 306 mm
height85 / 102 mm
weight30,0 kg
construction materialsSS, OF-Cu, PTFE
vacuum interfaceISO63
proposed mounting styleISO hardware

 

Al, 52Å/s; 3 kW; 10 cm
Ti, 36Å/s; 3 kW DC; 6,5 cm
non-magnetic targets3 x 10-3 to 10-1 mbar Ar
best performance5 x 10-3 to 5 x 10-2 mbar Ar
He leak check≤ 1 x 10-8 mbar Ar * l/s
max. power, watts10 KW DC / 3 KW RF (**)
max. voltage, DC1000 V
max. current, DC25 A
rec. power supply 10 KW
connector DCscrew terminals
connector RF (**)**
water flow1 l / (min x kW)
minimum flow3 l/min
inlet temperature≤ 30°C
max. pressure≤ 3 bar open drain
water tubesØ8xØ6 mm PTFE
magnet arraypermanent NdFeB
max. temperature60 °C

Accessories and options

  • chimney
  • gas distribution
  • model for magnetics targets:
    Ni 6 mm
  • quick coupling f/t
  • RF power line
  • coax power jack or screw terminals

Mounting options

  • ISO320-K or CF350
  • z-manipulator
  • z-adjust: quick coupling f/t + tube OD 1”

Assembly dwg

* This value refers to the magnetron itself. The maximum power is determined by the target material and
its bonding or clamping technique.
** RF-Version requires special connector and/or installation. More details on request.

We reserve the right for technical changes in design and specifications without notice or obligations.

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