IONIX® 2'' HV Planar Magnetron Sputtering Source

Features

  • internal mounting with DN25KF or CF16
  • target diameter 2” (50,8 mm)
  • optionally: magnetic targets: Ni 2 - 3 mm, Fe 1mm thick
  • targets 2 - 6 mm thick, non-magnetic
  • magnet array completely isolated from cooling water
  • directly cooled membrane plate
  • for DC, AC, RF and pulsed operation
  • water tubes Ø6xØ4 mm
Datasheet

The IONIX® IX2 is the smallest IONIX® high vacuum magnetron with target diameter of 50,8 mm (2‘‘) that is widely used in thin film research and development. It is a versatile tool for small and economic R&D type thin film deposition systems. The target thickness can vary between 2 up to 6 mm.

The IX2 features indirect cooling of the target with a thick membrane plate. The magnet array is completely isolated from the cooling water. The anode shield can be adjusted to set he dark space gap for different target thicknesses. A magnet array for magnetic target materials (2 mm Ni, 1 mm Fe) is optionally available.

y means of the KF25 interface the sputtering source can be either mounted on a straight Ø1‘‘ or Ø3/4‘‘ tube or on a tilt. ISO or CF flange mounted sources are also available.

Technical Data

typeIONIX-2HV
model no.IX2_A041-A044
formcircular / planar
diameter2” ± 0,2 mm, optional 50 mm
thickness2 to 6 mm non-magnetic
coolingindirect / direct
dark space distance1,5 ± 0,3
diameter 78 / 86 mm
height 94 mm
weight 1,5 kg
construction materials SS, OF-Cu, PTFE
vacuum interface KF25 / CF16
proposed mounting style tube Ø1” x 300 mm
2 Å/s; 300 W RF, SiO2, 10 cm
Al, 8 Å/s; 300 W DC, 10 cm
Cu, 15 Å/s; 300 W DC, 10 cm
film thickness uniformity ± 5% on Ø50 mm @ 100 mm
non-magnetic targets3 x 10-3 to 10-1 mbar Ar
best performance5 x 10-3 to 5 x 10-2 mbar Ar
He leak check≤ 1 x 10-8 mbar Ar * l/s
max. power, watts600 W DC / 400 W RF (**)
max. voltage, DC1000 V
max. current, DC5 A
rec. power supply 1 KW
connector DCscrew terminals
connector RF (**)type 7/16”
water flow1 l / (min x kW)
minimum flow2 l/min
inlet temperature≤ 30°C
max. pressure≤ 2 bar open drain
water tubesØ6xØ4 mm PTFE
magnet arraypermanent NdFeB
max. temperature60 °C

Accessories and options

  • chimney
  • gas distribution
  • model for magnetics targets:
    Fe 1 mm, Ni 2 - 3 mm
  • quick coupling f/t
  • RF power line
  • pneumatic shutter
  • +/- 45° ex-situ tilt
  • 40° in-situ tilt
  • coax power jack or screw terminals

Mounting options

  • ISO100-K or CF100
  • z-manipulator
  • z-adjust: quick coupling f/t + tube OD 1”

Assembly dwg

* This value refers to the magnetron itself. The maximum power is determined by the target material and
its bonding or clamping technique.
** RF-Version requires special connector and/or installation. More details on request.

We reserve the right for technical changes in design and specifications without notice or obligations.

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